Comprehensive Metrology
& Inspection Solutions

TMAP product picture

TMAP | Tailored Metrology Automated Platform

Revolutionizing precision: Tailored, Automated, and Future-Ready for manufacturing excellence.

LightSpeed | Defect Inspector solutions

The LightSpeed is the world’s most flexible unpatterned defect inspection tool.

Lightspeed tool picture
PSD tool picture

PSD | Metrology & Defect-Inspection combined system

Elevating wafer topography & defect control with advanced Metro-Spection technology.

WOTAN | Automated Optical Inspection (AOI) solutions 

A unique AOI solution with Full-Color Optics and Simultaneous-Dual-Sided inspection capabilities.

EDGE picture of tool

EDGE | Inspection solutions

Maximizing efficiency with UnitySC’s comprehensive Edge inspection module.

AXIOSPECT | Semi-Automated Optical Inspection solutions

Microscope & Review Station: The ultimate inspection, review, and metrology solution with Zeiss Optics integration.

Axiospect picture of tool