At UnitySC, we provide a comprehensive range of services depending on your needs.

Through these services, we continuously maintain your tool’s health and performance to ensure we optimise their lifetime:

  • System upgrades
  • Relocation and reinstallation of tools
  • New application needs and qualification
  • Certification of personnel on Corrective/Preventive Maintenance
  • Comprehensive Service Contracts to ensure your fleet’s uptime, with timely spare’s delivery and certified technical expertise for your metrology/inspection equipment


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Downtime is extremely costly in the semiconductor industry.

As the original manufacturer of our Optical Inspection, Review & Metrology Tools, our spare parts meet the most stringent specifications. With UnitySC’s parts you are assured of getting the consistent and high quality performance you expect out of your UnitySC tools.

Our Spare Parts Team offers a quick and reliable service to keep your production lines moving at optimum speed. Simplify your purchasing of spares through a single trusted source, with the best value for price-performance.


Our team is happy to assist and answer to all your inquiries.
If you need assistance or you have any questions, please fill the form below: