CEA-Leti and UnitySC Announce Further Development To Fuel Industry 4.0 with Smarter Tools

SAN FRANCISCO – July 10, 2019 – Leti, a research institute of CEA Tech, and UnitySC, a wholly owned subsidiary of FOGALE Nanotech Group and a leader in inspection and metrology solutions for advanced semiconductor packaging, today announced a four-year extension of their collaboration to further advance metrology-inspection capabilities per tool, while reducing the tools’ footprint and cost of ownership.

CEA-Leti and UnitySC have been working on the development of a metrology-inspection platform for the past four years. The initial targeted applications were 3D integration modules, specialty bonding, and CMP. So far, the collaboration has helped advance UnitySC’s system from a table-top tool to a fully automated 200-300 mm Swiss Army knife-like platform that has shown very good performance during the validation phase. Today, UnitySC and CEA-Leti extend this collaboration to finalize the improvement of the platform and enhance its application space.

The extended collaboration also will address smarter tools for Industry 4.0. CEA-Leti and UnitySC will specifically work towards improving the platform’s ease of use and reliability, enhancing the multi-sensor approach of today tools, and bringing intelligence to the platform by adding innovative artificial intelligence (AI) approaches.

This new generation of the platform, announced during SEMICON West, will allow users to tackle several control problems on different applications. These include buried interface defects on Si and GaN, and SiC edge defectivity control, as well as etch and roughness, bonded wafers and chip-to-wafer alignment, among others.

About UnitySC (France)

UnitySC, the only French company in Semi equipment for Metrology and inspection, Leader in Europe, Leading the Power and advance packaging Market headquartered in Montbonnot near Grenoble. Unity SC tools combine advanced technologies in automated optical inspection and 3D imaging with microscopy, temporal-mode interferometry, and spectrometry, which enables customers to deliver higher yields and faster time to market solutions to our customers. They are supplying all the largest tier one player in the semiconductor industry. We are extended the footprint to service its customers regionally and locally: Europe, Korea, Singapore, Taiwan, Japan, USA and China with our New JV in Shenzhen.

About CEA-Leti (France)

Leti, a technology research institute at CEA Tech, is a global leader in miniaturization technologies enabling smart, energy-efficient and secure solutions for industry. Founded in 1967, Leti pioneers micro-& nanotechnologies, tailoring differentiating applicative solutions for global companies, SMEs and startups. CEA-Leti tackles critical challenges in healthcare, energy and digital migration. From sensors to data processing and computing solutions, CEA-Leti’s multidisciplinary teams deliver solid expertise, leveraging world-class pre-industrialization facilities. With a staff of more than 1,900, a portfolio of 2,700 patents, 91,500 sq. ft. of cleanroom space and a clear IP policy, the institute is based in Grenoble, France, and has offices in Silicon Valley and Tokyo. CEA-Leti has launched 60 startups and is a member of the Carnot Institutes network. This year, the institute celebrates its 50th anniversary. Follow us on www.leti-cea.com and @CEA_Leti.

CEA Tech is the technology research branch of the French Alternative Energies and Atomic Energy Commission (CEA), a key player in innovative R&D, defence & security, nuclear energy, technological research for industry and fundamental science, identified by Thomson Reuters as the second most innovative research organization in the world. CEA Tech leverages a unique innovation-driven culture and unrivalled expertise to develop and disseminate new technologies for industry, helping to create high-end products and provide a competitive edge.


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