In the rapidly advancing field of semiconductor manufacturing, achieving high throughput without sacrificing quality is paramount. UnitySC’s WOTAN and THOR systems, our flagship Auto Optical Inspection (AOI) tools, are engineered to meet these demands by offering superior inspection capabilities for both patterned wafer defects and wafer edges. Discover how these innovative tools are transforming the landscape of semiconductor inspection.

 

1. WOTAN | High Throughput Patterned Wafer Inspection

  • Optimized for Speed and Accuracy: WOTAN is designed to inspect patterned wafers with exceptional speed and precision. This tool allows manufacturers to rapidly identify and analyze defects on patterned wafers, ensuring high-quality outputs without compromising on throughput.
  • Advanced Imaging Technology: Featuring patented True Color Imaging (TCI), WOTAN provides a more accurate representation of the wafer, capturing a detailed and true-to-life image that enhances defect detection and analysis.
  • Efficient and Flexible Handling: WOTAN supports a wide range of wafer thicknesses, including the challenging Taiko wafers, and offers on-the-fly wafer alignment. This flexibility enhances the inspection process, adapting to various wafer types and sizes with ease.

 

2. THOR | High Throughput Edge Defect Inspection

  • Comprehensive Edge Analysis: THOR is specifically designed to inspect wafer edges at high throughput rates. With five cameras covering the full wafer edge, THOR ensures no defect goes unnoticed, from minor imperfections to significant anomalies.
  • Simultaneous Dual-Sided Inspection: One of THOR’s standout features is its ability to perform simultaneous inspections of both the front and back sides of the wafer. This capability allows for comprehensive defect correlation and a more holistic view of wafer quality.
  • High Magnification for Detailed Review: The high magnification review station within THOR provides an in-depth look at detected defects, allowing for immediate and detailed examination, crucial for quality control and rapid decision-making.
  • Streamlined Operations and Setup
  • Quick Recipe Setup and Small Footprint: Both WOTAN and THOR are designed for efficiency not only in operation but also in setup. The quick and easy recipe creation process and the small footprint of approximately 300mm for the loadport make these tools ideal for environments where space and time are at a premium.

 

UnitySC’s WOTAN and THOR systems are at the forefront of AOI technology, offering unmatched capabilities in patterned and edge defect inspection. By harnessing the power of advanced optical technologies and streamlined design, these tools are essential for semiconductor manufacturers aiming for perfection in production.

Step into the future of semiconductor inspection with WOTAN and THOR.

Contact us today to learn how our AOI solutions can enhance your production efficiency and quality.